Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films

by Aile Tamm, Kristjan Kalam, Helina Seemen, Jekaterina Kozlova, Kaupo Kukli, Jaan Aarik, Joosep Link, Raivo Stern, Salvador Dueñas, Helena Castán
Published 2017-12-01

Atomic layer deposition and properties of mixed Ta2O5 and ZrO2 films

by Kaupo Kukli, Marianna Kemell, Marko Vehkamäki, Mikko J. Heikkilä, Kenichiro Mizohata, Kristjan Kalam, Mikko Ritala, Markku Leskelä, Ivan Kundrata, Karol Fröhlich
Published 2017-02-01

Atomic layer deposition and properties of ZrO2/Fe2O3 thin films

by Kristjan Kalam, Helina Seemen, Peeter Ritslaid, Mihkel Rähn, Aile Tamm, Kaupo Kukli, Aarne Kasikov, Joosep Link, Raivo Stern, Salvador Dueñas, Helena Castán, Héctor García
Published 2018-01-01