large-scale data analysis of in-situ Plasma optical emission spectroscopy for PECVD hydrogenated nano-crystalline silicon (nc-Si:H) films

by Li-Han Kau, 高立翰
Published 2018

A lab-on-phone instrument with varifocal microscope via a liquid-actuated aspheric lens (LAL).

by Yiin-Kuen Fuh, Zheng-Hong Lai, Li-Han Kau, Hung-Jui Huang
Published 2017-01-01

In Situ Plasma Monitoring of PECVD nc-Si:H Films and the Influence of Dilution Ratio on Structural Evolution

by Yu-Lin Hsieh, Li-Han Kau, Hung-Jui Huang, Chien-Chieh Lee, Yiin-Kuen Fuh, Tomi T. Li
Published 2018-07-01

Correlation of Impedance Matching and Optical Emission Spectroscopy during Plasma-Enhanced Chemical Vapor Deposition of Nanocrystalline Silicon Thin Films

by Li-Han Kau, Hung-Jui Huang, Hsueh-Er Chang, Yu-Lin Hsieh, Chien-Chieh Lee, Yiin-Kuen Fuh, Tomi T. Li
Published 2019-05-01