Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation

by Yuki Shimizu, Lue Quan, Dong Wook Shin, Hiraku Matsukuma, Wei Gao
Published 2021-12-01

In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser

by Dong Wook Shin, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Eberhard Manske, Wei Gao
Published 2021-08-01