The Influence of Oxygen Pressure on ZnO:Al Thin Films Properties Grown Layer by Layer Growth Method at Magnetron Sputtering

by A. I. Evtushenko, O. I. Bykov, L. O. Klochkov, O. S. Lytvyn, V. M. Tkach, O. M. Kutsay, S. P. Staryk, V. A. Baturyn, O. Y. Karpenko, M. G. Dusheyko, G. V. Lashkarev
Published 2015-12-01

The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method

by A.I. Ievtushenko, M.G. Dusheyko, V.A. Karpyna, O.I. Bykov, P.M. Lytvyn, O.I. Olifan, V.A. Levchenko, A.A. Korchovyi, S.P. Starik, S.V. Tkach, G.V. Lashkarev
Published 2017-10-01