Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

by Maik Bertke, Ina Kirsch, Erik Uhde, Erwin Peiner
Published 2021-05-01

Cantilever-Droplet-Based Sensing of Magnetic Particle Concentrations in Liquids

by Wilson Ombati Nyang’au, Andi Setiono, Maik Bertke, Harald Bosse, Erwin Peiner
Published 2019-11-01

Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry

by Michael Fahrbach, Linus Krieg, Tobias Voss, Maik Bertke, Jiushuai Xu, Erwin Peiner
Published 2018-11-01

Strategy toward Miniaturized, Self-out-Readable Resonant Cantilever and Integrated Electrostatic Microchannel Separator for Highly Sensitive Airborne Nanoparticle Detection

by Maik Bertke, Jiushuai Xu, Michael Fahrbach, Andi Setiono, Hutomo Suryo Wasisto, Erwin Peiner
Published 2019-02-01

Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring

by Jiushuai Xu, Maik Bertke, Alaaeldin Gad, Feng Yu, Gerry Hamdana, Andrey Bakin, Erwin Peiner
Published 2017-08-01

Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries

by Maik Bertke, Uili Wobeto Reinheimer, Michael Fahrbach, Gerry Hamdana, Hutomo Suryo Wasisto, Erwin Peiner
Published 2017-08-01

Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing

by Jiushuai Xu, Maik Bertke, Xuejing Li, Andi Setiono, Michael Fahrbach, Angelika Schmidt, Erwin Peiner
Published 2018-12-01

Area-Selective Growth of Aligned ZnO Nanorod Arrays for MEMS Device Applications

by Jiushuai Xu, Klass Strempel, Hao Zhou, Andreas Waag, Maik Bertke, Angelika Schmidt, Erwin Peiner
Published 2018-11-01

Design of Miniaturized, Self-Out-Readable Cantilever Resonator for Highly Sensitive Airborne Nanoparticle Detection

by Maik Bertke, Jiushuai Xu, Michael Fahrbach, Andi Setiono, Gerry Hamdana, Hutomo Suryo Wasisto, Erwin Peiner
Published 2018-12-01

Piezoelectric MEMS Resonators for Cigarette Particle Detection

by Javier Toledo, Víctor Ruiz-Díez, Maik Bertke, Hutomo Suryo Wasisto, Erwin Peiner, José Luis Sánchez-Rojas
Published 2019-02-01

Real-Time Frequency Tracking of an Electro-Thermal Piezoresistive Cantilever Resonator with ZnO Nanorods for Chemical Sensing

by Andi Setiono, Jiushuai Xu, Michael Fahrbach, Maik Bertke, Wilson Ombati Nyang’au, Hutomo Suryo Wasisto, Erwin Peiner
Published 2019-01-01

Nanomechanical Traceable Metrology of Vertically Aligned Silicon and Germanium Nanowires by Nanoindentation

by Gerry Hamdana, Tony Granz, Maik Bertke, Zhi Li, Prabowo Puranto, Uwe Brand, Hutomo Suryo Wasisto, Erwin Peiner
Published 2017-08-01

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

by Andi Setiono, Maik Bertke, Wilson Ombati Nyang’au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner
Published 2020-01-01