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Marco Lisker
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Marco Lisker
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Marco Lisker
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1
Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM
by
Chia-Pin Yeh
,
Marco
Lisker
,
Bodo Kalkofen
,
Edmund P. Burte
Published 2016-03-01
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Article
2
High temperature reactive ion etching of iridium thin films with aluminum mask in CF4/O2/Ar plasma
by
Chia-Pin Yeh
,
Marco
Lisker
,
Bodo Kalkofen
,
Edmund P. Burte
Published 2016-08-01
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Article
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