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Mariazel Maqueda Lopez
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Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing
by
Mariazel
Maqueda
Lopez
,
Emanuele Andrea Casu
,
Montserrat Fernandez-Bolanos
,
Adrian Mihai Ionescu
Published 2017-08-01
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