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Matthias Van Gompel
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The Influence of Microstructure on Nanomechanical and Diffusion Barrier Properties of Thin PECVD SiOx Films Deposited on Parylene C Substrates
by
David Framil
,
Matthias
Van
Gompel
,
Florian Bourgeois
,
Ivo Furno
,
Yves Leterrier
Published 2019-12-01
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