Low-temperature germanium ultra-high vacuum chemical vapor deposition for back-end photonic integration

by Kimerling, Lionel C., McComber, Kevin A., Lui, Jifeng, Michel, Jurgen
Published 2010

Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer

by Sun, Rong, McComber, Kevin A., Cheng, Jing, Sparacin, Daniel K., Beals, Mark A., Michel, Jurgen, Kimerling, Lionel C.
Published 2013