Borosilicate Glass MEMS Lorentz Force Magnetometer

by Matthias Kahr, Matthias Domke, Harald Steiner, Wilfried Hortschitz, Michael Stifter
Published 2018-11-01

Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor

by Andreas Kainz, Wilfried Hortschitz, Harald Steiner, Michael Stifter, Franz Keplinger
Published 2018-12-01

3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

by Matthias Kahr, Harald Steiner, Wilfried Hortschitz, Michael Stifter, Andreas Kainz, Franz Keplinger
Published 2018-11-01

Novel 3D-Printed MEMS Magnetometer with Optical Detection

by Matthias Kahr, Wilfried Hortschitz, Harald Steiner, Michael Stifter, Andreas Kainz, Franz Keplinger
Published 2018-11-01

Cross-Sensitivity of an Optomechanical MEMS Transducer

by Harald Steiner, Andreas Kainz, Michael Stifter, Matthias Kahr, Gabor Kovacs, Franz Keplinger, Wilfried Hortschitz
Published 2018-12-01

Dual Resonator MEMS Magnetic Field Gradiometer

by Matthias Kahr, Michael Stifter, Harald Steiner, Wilfried Hortschitz, Gabor Kovács, Andreas Kainz, Johannes Schalko, Franz Keplinger
Published 2019-01-01

Characterization of a Micro-Opto-Mechanical Transducer for the Electric Field Strength

by Wilfried Hortschitz, Andreas Kainz, Harald Steiner, Gabor Kovacs, Michael Stifter, Matthias Kahr, Johannes Schalko, Franz Keplinger
Published 2018-11-01

Responsitivity Measurement of a Lorentz Force Transducer for Homogeneous and Inhomogeneous Magnetic Fields

by Matthias Kahr, Michael Stifter, Harald Steiner, Wilfried Hortschitz, Gabor Kovacs, Andreas Kainz, Johannes Schalko, Franz Keplinger
Published 2018-12-01

MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer

by Matthias Kahr, Michael Stifter, Harald Steiner, Wilfried Hortschitz, Gabor Kovacs, Andreas Kainz, Johannes Schalko, Franz Keplinger
Published 2018-12-01