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Mifeng Li
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Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application
by
Ying Yu
,
Mifeng
Li
,
Jifang He
,
Wendong Zhang
,
Jun Tang
,
Jun Liu
,
Zhichuan Niu
,
Chenyang Xue
,
Hao Guo
,
Haiqiao Ni
,
Yunbo Shi
Published 2012-12-01
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