PEALD-Grown Crystalline AlN Films on Si (100) with Sharp Interface and Good Uniformity

by Sanjie Liu, Mingzeng Peng, Caixia Hou, Yingfeng He, Meiling Li, Xinhe Zheng
Published 2017-04-01

Metallic indium segregation control of InN thin films grown on Si(1 0 0) by plasma-enhanced atomic layer deposition

by Yunlai An, Yingfeng He, Huiyun Wei, Sanjie Liu, Meiling Li, Yimeng Song, Peng Qiu, Abdul Rehman, Xinhe Zheng, Mingzeng Peng
Published 2019-03-01