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Mohd-Yasin, F.
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Mohd-Yasin, F.
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Mohd-Yasin, F.
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1
A review of MEMS capacitive microphones
by
Hamzah, A.A
,
Majlis, B.Y
,
Mohd
-
Yasin
,
F
.
,
Zawawi, S.A
Published 2020
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2
The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing
by
Hamzah, A.A
,
Majlis, B.Y
,
Mohd
-
Yasin
,
F
.
,
Zawawi, S.A
Published 2021
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3
Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment
by
Campo E.M
,
Dobisz E.A
,
Eldada L.A
,
Hamzah, A.A
,
Majlis, B.Y
,
Mohd
-
Yasin
,
F
.
,
Zawawi, S.A
Published 2017
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Related Subjects
Acoustic Sensors
Capacitive microphone
Microphones
Silicon carbide
Acoustic sensing
Acoustic sensor
Backplate
Coal mines
Computer software
Comsol multiphysics
Condenser microphone
Cubic silicon carbide
Design optimization
Diaphragm
Diaphragms
Elastic behaviour
Elastic diaphragms
Evolution
Fabrication method
Gas plants
High temperature and pressure
Indentation
Load-displacement curve
MEMS
MEMS capacitive microphone
Maximum deflection
Mechanical performance
Micro electromechanical system (MEMS)
Micro-electro-mechanical system (MEMS)
Microphone
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