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Mokhtarzadeh, M.
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Mokhtarzadeh, M.
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Mokhtarzadeh, M.
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1
A general global approximation method for the solution of boundary value problems
by
Mokhtarzadeh
,
M
. R.
Published 1998
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2
Optimization of etching processes for the fabrication of smooth silicon carbide membranes for applications in quantum technology
by
Carulla, M.
,
David, C.
,
Kozak, R.
,
Mokhtarzadeh
,
M
.
Published 2022
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Related Subjects
Electrochemical etching
Electrochemical etching (ECE)
Etching process
Fabrication
Fabry-Perot interferometers
Ion beam etching
Ion beam etching (IBE)
Ion beams
Ions
MEMS applications
Membranes
Optimisations
Quantum technologies
Reactive ion etching
Reactive ion etching (RIE)
Reactive-ion etching
Sensing applications
SiC
Silicon carbide
Substrates
Surface roughness
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