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Naiyuan Sheng
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Naiyuan Sheng
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Naiyuan Sheng
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1
Multi-Objective Defocus Robust Source and Mask Optimization Using Sensitive Penalty
by
Pengzhi Wei
,
Yanqiu Li
,
Tie Li
,
Naiyuan
Sheng
,
Enze Li
,
Yiyu Sun
Published 2019-05-01
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Article
2
Mitigating the Impact of Mask Absorber Error on Lithographic Performance by Lithography System Holistic Optimization
by
Naiyuan
Sheng
,
Enze Li
,
Yiyu Sun
,
Tie Li
,
Yanqiu Li
,
Pengzhi Wei
,
Lihui Liu
Published 2019-03-01
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