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Pik Kee Tan
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Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM
by
Binghai Liu
,
Zhi Li Dong
,
Younan Hua
,
Chao Fu
,
Xiaomin Li
,
Pik
Kee
Tan
,
Yuzhe Zhao
Published 2018-11-01
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