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Qianfa Deng
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Qianfa Deng
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Qianfa Deng
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1
Contrast Experiments in Dielectrophoresis Polishing (DEPP)/Chemical Mechanical Polishing (CMP) of Sapphire Substrate
by
Tianchen Zhao
,
Julong Yuan
,
Qianfa
Deng
,
Kaiping Feng
,
Zhaozhong Zhou
,
Xu Wang
Published 2019-09-01
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Article
2
Orthogonal Experimental Research on Dielectrophoresis Polishing (DEPP) of Silicon Wafer
by
Tianchen Zhao
,
Qianfa
Deng
,
Cheng Zhang
,
Kaiping Feng
,
Zhaozhong Zhou
,
Julong Yuan
Published 2020-05-01
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Article
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