Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS

by Erik Brachmann, Marietta Seifert, Steffen Oswald, Siegfried B. Menzel, Thomas Gemming
Published 2017-11-01

Phase Formation and High-Temperature Stability of Very Thin Co-Sputtered Ti-Al and Multilayered Ti/Al Films on Thermally Oxidized Si Substrates

by Marietta Seifert, Eric Lattner, Siegfried B. Menzel, Steffen Oswald, Thomas Gemming
Published 2020-04-01

Study of TiAl thin films on piezoelectric CTGS substrates as an alternative metallization system for high-temperature SAW devices

by Marietta Seifert, Eric Lattner, Siegfried B. Menzel, Steffen Oswald, Thomas Gemming
Published 2021-05-01

Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum

by Marietta Seifert, Gayatri K Rane, Benjamin Kirbus, Siegfried B Menzel, Thomas Gemming
Published 2015-12-01

Capability Study of Ti, Cr, W, Ta and Pt as Seed Layers for Electrodeposited Platinum Films on γ-Al2O3 for High Temperature and Harsh Environment Applications

by Marietta Seifert, Erik Brachmann, Gayatri K. Rane, Siegfried B. Menzel, Thomas Gemming
Published 2017-01-01

The Influence of the Composition of Ru100−xAlx (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability

by Marietta Seifert, Gayatri K. Rane, Steffen Oswald, Siegfried B. Menzel, Thomas Gemming
Published 2017-03-01

Stress and Microstructure Evolution in Mo Thin Films Without or with Cover Layers During Thermal-Cycling

by Eunmi Park, Marietta Seifert, Gayatri K. Rane, Siegfried B. Menzel, Thomas Gemming, Kornelius Nielsch
Published 2020-09-01

Mo-La₂O₃ Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

by Siegfried B. Menzel, Marietta Seifert, Abhinav Priyadarshi, Gayatri K. Rane, Eunmi Park, Steffen Oswald, Thomas Gemming
Published 2019-08-01

Mechanical Properties of ZTO, ITO, and a-Si:H Multilayer Films for Flexible Thin Film Solar Cells

by Claudia Hengst, Siegfried B Menzel, Gayatri K Rane, Vladimir Smirnov, Karen Wilken, Barbara Leszczynska, Dustin Fischer, Nicole Prager
Published 2017-03-01