Showing 1 - 1 results of 1 for search 'Soma Yamamoto', query time: 0.02s Refine Results
  1. 1
    Etching Characteristics of Si<i><sub>x</sub></i>N<i><sub>y</sub></i> Film on Textured Single Crystalline Silicon Surface Using Ar/CF<sub>4</sub> and He/CF<sub>4</sub> Surface-Discharge Plasma
    Get full text
    Article
Search Tools: Get RSS Feed — Email this Search