Wafer Bonding of SiC-AlN at Room Temperature for All-SiC Capacitive Pressure Sensor

by Fengwen Mu, Yang Xu, Seongbin Shin, Yinghui Wang, Hengyu Xu, Haiping Shang, Yechao Sun, Lei Yue, Tatsurou Tsuyuki, Tadatomo Suga, Weibing Wang, Dapeng Chen
Published 2019-09-01