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Temesgen Bailie Workie
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Temesgen Bailie Workie
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Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure
by
Jiacheng Liu
,
Temesgen
Bailie
Workie
,
Ting Wu
,
Zhaohui Wu
,
Keyuan Gong
,
Jingfu Bao
,
Ken-ya Hashimoto
Published 2020-12-01
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