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Tzung Hua Ying
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Tzung Hua Ying
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Tzung Hua Ying
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1
Superior PSZ-SOD Gap-Fill Process Integration Using Ultra-Low Dispensation Amount in STI for 28 nm NAND Flash Memory and Beyond
by
Chun Chi Lai
,
Yi Wen Lu
,
Hung Ju Chien
,
Tzung
Hua
Ying
Published 2015-01-01
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Article
2
The Reliability Improvement of Cu Interconnection by the Control of Crystallized α-Ta/TaNx Diffusion Barrier
by
Wei-Lin Wang
,
Chia-Ti Wang
,
Wei-Chun Chen
,
Kuo-Tzu Peng
,
Ming-Hsin Yeh
,
Hsien-Chang Kuo
,
Hung-Ju Chien
,
Jen-Chi Chuang
,
Tzung
-
Hua
Ying
Published 2015-01-01
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Article
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