Versatile direct-writing of dopants in a solid state host through recoil implantation

by Johannes E. Fröch, Alan Bahm, Mehran Kianinia, Zhao Mu, Vijay Bhatia, Sejeong Kim, Julie M. Cairney, Weibo Gao, Carlo Bradac, Igor Aharonovich, Milos Toth
Published 2020-10-01