In situ study of hydrogen silsesquioxane dissolution rate in salty and electrochemical developers

by Harry, Katherine J., Strobel, Sebastian, Yang, Joel K. W., Duan, Huigao, Berggren, Karl K.
Published 2013

Electrothermal feedback in superconducting nanowire single-photon detectors

by Kerman, Andrew J., Yang, Joel K. W., Molnar, Richard J., Dauler, Eric A., Berggren, Karl K.
Published 2010

Electrochemical development of hydrogen silsesquioxane by applying an electrical potential

by Strobel, Sebastian, Harry, Katherine J., Duan, Huigao, Yang, Joel K. W., Manfrinato, Vitor Riseti, Berggren, Karl K.
Published 2012

Sub-15-nm nanoimprint molds and pattern transfer

by Morecroft, Debbie, Yang, Joel K. W., Schuster, S., Berggren, Karl K., Xia, Qiangfei, Wu, Wei, Williams, R. Stanley
Published 2009

Metrology for electron-beam lithography and resist contrast at the sub-10 nm scale

by Duan, Huigao, Manfrinato, Vitor Riseti, Yang, Joel K. W., Winston, Donald, Cord, Bryan M., Berggren, Karl K.
Published 2012

Sub-10-nm half-pitch electron-beam lithography by using poly(methyl methacrylate) as a negative resist

by Berggren, Karl K., Duan, Huigao, Winston, Donald, Yang, Joel K. W., Cord, Bryan M., Manfrinato, Vitor Riseti
Published 2012

Limiting factors in sub-10 nm scanning-electron-beam lithography

by Berggren, Karl K., Cord, Bryan M., Yang, Joel K. W., Duan, Huigao, Joy, David C., Klingfus, Joseph
Published 2012

Suppressed Critical Current in Superconducting Nanowire Single-Photon Detectors With High Fill-Factors

by Yang, Joel K. W., Kerman, Andrew J., Dauler, Eric A., Cord, Bryan M., Anant, Vikas, Molnar, Richard J., Berggren, Karl K.
Published 2012

Using surface plasmons to enhance the speed and efficiency of superconducting nanowire single-photon detectors

by Hu, Xiaolong, Dauler, Eric A., Kerman, Andrew J., Yang, Joel K. W., White, James E., Herder, Charles Henry, Berggren, Karl K.
Published 2010

Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography

by Berggren, Karl K., Yang, Joel K. W., Cord, Bryan M., Duan, Huigao, Klingfus, Joseph, Nam, Sung-Wook, Kim, Ki-Bum, Rooks, Michael J.
Published 2012

Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

by Nam, Sung-Wook, Rooks, Michael J., Yang, Joel K. W., Berggren, Karl K., Kim, Hyun-Mi, Lee, Min-Hyun, Kim, Ki-Bum, Sim, Jae Hwan, Yoon, Do Yeung
Published 2012

Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist

by Winston, Donald, Cord, Bryan M., Ming, B., Bell, David C., DiNatale, W. F., Stern, L. A., Vladar, A. E., Postek, M. T., Mondol, Mark K., Yang, Joel K. W., Berggren, Karl K.
Published 2012

Templated self-assembly of Si-containing block copolymers for nanoscale device fabrication

by Ross, Caroline A., Manners, I., Gwyther, J., Jung, Yeon Sik, Chuang, Vivian Peng-Wei, Son, Jeong Gon, Gotrik, Kevin W., Mickiewicz, R. A., Yang, Joel K. W., Chang, J. B., Berggren, Karl K.
Published 2010