Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors

by Jiahong Zhang, Yang Zhao, Yixian Ge, Min Li, Lijuan Yang, Xiaoli Mao
Published 2016-10-01

Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System

by Jiahong Zhang, Jianxiang Chen, Min Li, Yixian Ge, Tingting Wang, Peng Shan, Xiaoli Mao
Published 2018-02-01