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Youngtae Choi
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Remote Plasma Atomic Layer Deposition of SiN<sub>x</sub> Using Cyclosilazane and H<sub>2</sub>/N<sub>2</sub> Plasma
by
Haewon Cho
,
Namgue Lee
,
Hyeongsu Choi
,
Hyunwoo Park
,
Chanwon Jung
,
Seokhwi Song
,
Hyunwoo Yuk
,
Youngjoon Kim
,
Jong-Woo Kim
,
Keunsik Kim
,
Youngtae
Choi
,
Suhyeon Park
,
Yurim Kwon
,
Hyeongtag Jeon
Published 2019-08-01
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