MODIFICATION OF SILICON SURFACE UNDER INFLUENCE OF RADIATION OF A NANOSECOND ULTRAVIOLET LASER

by T.V. Malinskiy, S.I. Mikolutskiy, V.E. Rogalin, Yu.V. Khomich, V.A. Yamshchikov, I.A. Kaplunov, A.I. Ivanova
Published 2020-12-01