A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

by Xiaoyu Chen, Yuyu Xia, Yifei Mao, Yun Huang, Jia Zhu, Jun Xu, Rui Zhu, Lei Shi, Wengang Wu
Published 2020-01-01