Modeling Open-Loop MEMS Tunneling Accelerometer Based on Circular Plate
In this paper open-loop MEMS tunneling accelerometer was modeled based on a clamped micro circular plate with a tip tunneling at its centre. Mechanical behavior of the micro plate was studied deriving governing equation based on classic Kirchhoff thin plate theory and it was discretized using Galerk...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_07/P_132.pdf |