Influence of GLAD Sputtering Configuration on the Crystal Structure, Morphology, and Gas-Sensing Properties of the WO<sub>3</sub> Films

Influence of GLAD Sputtering Configuration on the Crystal Structure, Morphology, and Gas-Sensing Properties of the WO<sub>3</sub> Films

In this paper, we describe a deposition method and investigation of the physical properties of WO<sub>3</sub> films. We investigated tungsten oxide due to its potential application as a gas sensor. Thin films of the WO<sub>3</sub> were deposited on glass, silicon, and alumina...

Full description

Bibliographic Details
Main Authors: Arkadiusz Zarzycki, Katarzyna Dyndał, Maciej Sitarz, Jie Xu, Feng Gao, Konstanty Marszałek, Artur Rydosz
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Coatings
Subjects:
gas sensors
thin films
GLAD sputtering
tungsten oxides
acetone detection
Online Access:https://www.mdpi.com/2079-6412/10/11/1030

Internet

https://www.mdpi.com/2079-6412/10/11/1030

Similar Items