Rapid thermal treatment robotics unit for creation of electronic equipment devices
The design specific features of the rapid thermal treatment automated unit for silicon wafers with the diameter of 100 mm are described. For preheating the unit uses the halogen lamps with a tungsten spiral of KGT 220-2000-3 in the quantity of 12 pieces, which ensure the wafer heating up to 1200 ºC...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/1099 |