Assessing Measurement Noise Effect in Run-to-Run Process Control: Extends EWMA Controller by Kalman Filter

Assessing Measurement Noise Effect in Run-to-Run Process Control: Extends EWMA Controller by Kalman Filter

Recently, the Exponentially Weighted Moving Average (EWMA) controller has become a popular control method in Run-to-Run (RtR) process control, but the issue of measurement noise from metrology tools has not been addressed in RtR EWMA controllers yet. This paper utilizes a Kalman Filter (KF) controll...

Full description

Bibliographic Details
Main Authors: Tzu-Wei Kuo, An-Chen Lee
Format: Article
Language:English
Published: Chinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA) 2011-09-01
Series:International Journal of Automation and Smart Technology
Subjects:
Run-to-Run
Exponentially Weighted Moving Average (EWMA)
Kalman Filter
measurement noise
Online Access:http://www.ausmt.org/index.php/AUSMT/article/view/71

Internet

http://www.ausmt.org/index.php/AUSMT/article/view/71

Similar Items