Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film
This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subseque...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-05-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/5/524 |