Model to Analyze Micro Circular Plate Subjected to Electrostatic Force
In this paper a distributed model with three possible static modes was presented to investigate the behavior of the plate subjected to electrostatic force and uniform hydrostatic pressure both before pull in and beyond pull in. The differential governing equation of the micro circular plate specific...
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2013-06-01
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| Series: | Sensors & Transducers |
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| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/june_2013/P_1230.pdf |