Proportional Microvalve Using a Unimorph Piezoelectric Microactuator

Proportional Microvalve Using a Unimorph Piezoelectric Microactuator

Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. Polydimethylsiloxane (PDMS)-based pneumatic microvalves are commonly used but they generally require large peripheral connections that decrease portability. There are many alternatives found i...

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Bibliographic Details
Main Authors: Arun Gunda, Gürhan Özkayar, Marcel Tichem, Murali Krishna Ghatkesar
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Micromachines
Subjects:
microvalve
microactuator
piezoelectric
unimorph
stereolithography
3d-printing
Online Access:https://www.mdpi.com/2072-666X/11/2/130

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https://www.mdpi.com/2072-666X/11/2/130

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