Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy
The <b>s</b>urface and thickness distribution measurement for transparent film is of interest for electronics and packaging materials. Structured illumination microscopy (SIM) is a prospective technique for measuring film due to its high accuracy and efficiency. However, when the distanc...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-03-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/7/3023 |