The Effect of Annealing on Nanothick Indium Tin Oxide Transparent Conductive Films for Touch Sensors

This study aims to discuss the sheet resistance of ultrathin indium tin oxide (ITO) transparent conductive films during the postannealing treatment. The thickness of the ultrathin ITO films is 20 nm. They are prepared on B270 glass substrates at room temperature by a direct-current pulsed magnetron...

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Bibliographic Details
Main Authors: Shih-Hao Chan, Meng-Chi Li, Hung-Sen Wei, Sheng-Hui Chen, Chien-Cheng Kuo
Format: Article
Language:English
Published: Hindawi Limited 2015-01-01
Series:Journal of Nanomaterials
Online Access:http://dx.doi.org/10.1155/2015/179804