Role of plasma parameters on the characteristics properties of flexible transparent ITO films deposited by 3D facing and planar facing magnetron sources
A rectangular closed and hollow three-dimensionally confined large area magnetron source (3-DCLAMS) and a conventional moderate area facing target magnetron source (FTMS) have been used to study the plasma characteristics using different diagnostics at different working pressures. Flexible indium ti...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0017519 |