Highly Accurate Digital Processing of Large Stroke Guideway with an Optical Material-Corning Code 7972
Currently, meter-long guideways rarely achieve an accuracy of dozens of nanometers due to processing difficulties such as the material and the edge effect. In this paper, we focus on this problem and propose a set of optimization processing methods to cope with it. In the grinding stage, a grinding...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-07-01
|
| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/14/14/3809 |