Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review

Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review

This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element m...

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Bibliographic Details
Main Authors: Dovydas Barauskas, Mindaugas Dzikaras, Dovydas Bieliauskas, Donatas Pelenis, Gailius Vanagas, Darius Viržonis
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Sensors
Subjects:
Capacitive Micromachined Ultrasound Transducer
gas sensing, molecule sensing
Micro Electro Mechanical System
microfabrication
finite element modeling
Online Access:https://www.mdpi.com/1424-8220/20/12/3554

Internet

https://www.mdpi.com/1424-8220/20/12/3554

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