Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

A novel multifrequency excitation (MFE) method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE) method, the computational time for testing one chip under four modes at a 1-Hz frequency resolutio...

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Bibliographic Details
Main Authors: Yan Deng, Bin Zhou, Chao Xing, Rong Zhang
Format: Article
Language:English
Published: MDPI AG 2014-10-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/14/10/19507