Study of Optical Humidity Sensing Properties of Sol-Gel Processed TiO2 and MgO Films
Paper reports a comparative study of humidity sensing properties of TiO2 and MgO films fabricated by Sol-gel technique using optical method. One sensing element of the optical humidity sensor presented here consists of rutile structured two-layered TiO2 thin film deposited on the base of an isosce...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_07/P_138.pdf |