Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma
A triode multi-hollow VHF SiH4/H2 plasma (60 MHz) was examined at a pressure of 20 Pa by two-dimensional simulations using the fluid model. In this study, we considered the effect of the rate constant of reaction, SiH3 + SiH3→SiH2 + SiH4, on the plasma characteristics. A typical VHF plasma of a high...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-02-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5003911 |