Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma
A triode multi-hollow VHF SiH4/H2 plasma (60 MHz) was examined at a pressure of 20 Pa by two-dimensional simulations using the fluid model. In this study, we considered the effect of the rate constant of reaction, SiH3 + SiH3→SiH2 + SiH4, on the plasma characteristics. A typical VHF plasma of a high...
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doaj-0476d3af0ab248a8b8e41611eee6c2e22020-11-24T23:06:07ZengAIP Publishing LLCAIP Advances2158-32262018-02-0182025316025316-1010.1063/1.5003911064802ADVTwo-dimensional simulations of multi-hollow VHF SiH4/H2 plasmaLi-Wen Su0Weiting Chen1Kiichiro Uchino2Yoshinobu Kawai3Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-85802, JapanInterdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-85802, JapanInterdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-85802, JapanInterdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-85802, JapanA triode multi-hollow VHF SiH4/H2 plasma (60 MHz) was examined at a pressure of 20 Pa by two-dimensional simulations using the fluid model. In this study, we considered the effect of the rate constant of reaction, SiH3 + SiH3→SiH2 + SiH4, on the plasma characteristics. A typical VHF plasma of a high-electron density with a low-electron temperature was obtained between two discharge electrodes. Spatial profiles of SiH3+, SiH2+, SiH3- and SiH3 densities were similar to that of the electron density while the electron temperature had a maximum value near the two discharge electrodes. It was found that the SiH3 radical density did not decrease rapidly near the substrate and the electron temperature was lower than 1 eV, suggesting that the triode multi-hollow plasma source can provide high quality amorphous silicon with a high deposition rate.http://dx.doi.org/10.1063/1.5003911 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Li-Wen Su Weiting Chen Kiichiro Uchino Yoshinobu Kawai |
spellingShingle |
Li-Wen Su Weiting Chen Kiichiro Uchino Yoshinobu Kawai Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma AIP Advances |
author_facet |
Li-Wen Su Weiting Chen Kiichiro Uchino Yoshinobu Kawai |
author_sort |
Li-Wen Su |
title |
Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma |
title_short |
Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma |
title_full |
Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma |
title_fullStr |
Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma |
title_full_unstemmed |
Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma |
title_sort |
two-dimensional simulations of multi-hollow vhf sih4/h2 plasma |
publisher |
AIP Publishing LLC |
series |
AIP Advances |
issn |
2158-3226 |
publishDate |
2018-02-01 |
description |
A triode multi-hollow VHF SiH4/H2 plasma (60 MHz) was examined at a pressure of 20 Pa by two-dimensional simulations using the fluid model. In this study, we considered the effect of the rate constant of reaction, SiH3 + SiH3→SiH2 + SiH4, on the plasma characteristics. A typical VHF plasma of a high-electron density with a low-electron temperature was obtained between two discharge electrodes. Spatial profiles of SiH3+, SiH2+, SiH3- and SiH3 densities were similar to that of the electron density while the electron temperature had a maximum value near the two discharge electrodes. It was found that the SiH3 radical density did not decrease rapidly near the substrate and the electron temperature was lower than 1 eV, suggesting that the triode multi-hollow plasma source can provide high quality amorphous silicon with a high deposition rate. |
url |
http://dx.doi.org/10.1063/1.5003911 |
work_keys_str_mv |
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