The Fabrication and Application of a PDMS Micro Through-Holes Mask in Electrochemical Micromanufacturing
The electrochemical micromanufacturing process, as a key micromanufacturing technology, plays an important role in diverse industries. In this paper, polydimethylsiloxane (PDMS) is employed as a mask in the electrochemical micromanufacture of microstructures because of its chemical resistance, low c...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2014-08-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1155/2014/943092 |