Optimization of Contact Force and Pull-in Voltage for Series based MEMS Switch
Cantilever based metal-to-metal contact type MEMS series switch has many applications namely in RF MEMS, Power MEMS etc. A typical MEMS switch consists of a cantilever as actuating element to make the contact between the two metal terminals of the switch. The cantilever is pulled down by applying a...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2010-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_2010/P_598.pdf |