Optimization of Contact Force and Pull-in Voltage for Series based MEMS Switch
Cantilever based metal-to-metal contact type MEMS series switch has many applications namely in RF MEMS, Power MEMS etc. A typical MEMS switch consists of a cantilever as actuating element to make the contact between the two metal terminals of the switch. The cantilever is pulled down by applying a...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2010-04-01
|
Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_2010/P_598.pdf |