High resolution capacitance detection circuit for rotor micro-gyroscope
Conventional methods for rotor position detection of micro-gyroscopes include common exciting electrodes (single frequency) and common sensing electrodes (frequency multiplex), but they have encountered some problems. So we present a high resolution and low noise pick-off circuit for micro-gyroscope...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2014-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4869239 |