MEMS Tunneling Micro Thermometer Based onTip Deflection of Bimetallic Cantilever Beam
Micro-electro-mechanical (MEM) technology promises to significantly reduce the size, weight and cost of a variety of sensor systems. In this article has been described a highly sensitive novel type of thermometer based on deflection of a “bimetallic” microbeam. The proposed thermometer converts the...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-10-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_07/P_199.pdf |