Effect of Ti-Al cathode grain size on plasma generation and thin film synthesis from a direct current vacuum arc plasma source
Herein, we investigate the influence of powder metallurgical manufactured Ti0.5Al0.5 cathode grain size (45-150 μm) on the properties of a DC arc discharge, for N2 pressures in the range 10-5 Torr (base pressure) up to 3x10-2 Torr. Intermetallic TiAl cathodes are also studied. The arc plasma is char...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5092864 |